Summary
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Authors: Daria D. Bezshlyakh, Hendrik Spende, Thomas Weimann, Peter Hinze, Steffen Bornemann, Jan Gülink, Joan Canals, Joan Daniel Prades, Angel Dieguez, Andreas Waag
Journal title: Microsystems & Nanoengineering
Journal number: 6/1
Journal publisher: Springer Nature
Published year: 2020
DOI identifier: 10.1038/s41378-020-00198-y
ISSN: 2055-7434