Summary
This is a publication. If there is no link to the publication on this page, you can try the pre-formated search via the search engines listed on this page.
Authors: Shinta Mariana, Gregor Scholz, Feng Yu, Agus Budi Dharmawan, Iqbal Syamsu, Joan Daniel Prades, Andreas Waag, Hutomo Suryo Wasisto
Journal title: MNE 2018 – The 44th International Conference on Micro- and Nanofabrication and Manufacturing using Lithography and Related Techniques
Journal number: 24-27 September 2018
Journal publisher: MNE 2018 – The 44th International Conference on Micro- and Nanofabrication and Manufacturing using Lithography and Related Techniques
Published year: 2018
DOI identifier: 10.5281/zenodo.2489741