Selective-area femtosecond laser lift-off processing of GaN LED chips

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Authors: Nursidik Yulianto, Steffen Bornemann, Jan Gülink, Yuliati Herbani, Shinta Mariana, Raden Priyo Hartono Adji, Joan Daniel Prades, Andreas Waag, Hutomo Suryo Wasisto

Journal title: The 3rd MRS-id Meeting (MRS-id 2018)

Journal number: 31 July – 2 August 2018

Journal publisher: MRS-id

Published year: 2018

DOI identifier: 10.5281/zenodo.2491687