Selective-area micromachining of InGaN/GaN LED chips using ultrashort pulse laser

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Authors: Nursidik Yulianto, Steffen Bornemann, Jan Gülink, Lars Daul, Ludger Koenders, Andreas Waag, Hutomo Suryo Wasisto

Journal title: International Workshop on Nitride Semiconductors 2018 (IWN 2018)

Journal number: 11-16 November 2018

Journal publisher: International Workshop on Nitride Semiconductors 2018 (IWN 2018)

Published year: 2018

DOI identifier: 10.5281/zenodo.2493033