Fabrication, Characterization, and Simulation of Glass Devices with Al N Thin-Film Transducers for Excitation of Ultrasound Resonances

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Authors: André G. Steckel; Henrik Bruus; Paul Muralt; Ramin Matloub

Journal title: Physical Review Applied

Journal number: Volume 16, Issue 1

Journal publisher: American Physical Society

Published year: 2021

DOI identifier: 10.1103/physrevapplied.16.014014

ISSN: 2331-7019