Impact of negative bias on the piezoelectric properties through the incidence of abnormal oriented grains in Al0.62Sc0.38N thin films

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Authors: C.S. Sandu, F. Parsapour, D. Xiao, R. Nigon, L.M. Riemer, T. La Grange, P. Muralt

Journal title: Thin Solid Films

Journal number: Volume 697

Journal publisher: Elsevier Science

Published year: 2020

DOI identifier: 10.1016/j.tsf.2020.137819

ISSN: 1879-2731