C-Axis Textured, 2–3 μm Thick Al0.75Sc0.25N Films Grown on Chemically Formed TiN/Ti Seeding Layers for MEMS Applications

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Authors: Asaf Cohen, Hagai Cohen, Sidney R. Cohen, Sergey Khodorov, Yishay Feldman, Anna Kossoy, Ifat Kaplan-Ashiri, Anatoly Frenkel, Ellen Wachtel, Igor Lubomirsky, and David Ehre

Journal title: Sensors

Journal number: 22

Journal publisher: Multidisciplinary Digital Publishing Institute (MDPI)

Published year: 2022

DOI identifier: 10.3390/s22187041

ISSN: 1424-8220