Femtosecond laser processing of ceria-based micro actuators

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Authors: Eran Mishuk, Jenny Shklovsky, Yuval Berg, Niv Vengerovsky, Tanmoy Paul, Zvi Kotler, Yoed Tsur, Yosi Shacham-Diamand, Slava Krylov, Igor Lubomirsky

Journal title: Microelectronic Engineering

Journal number: 217

Journal publisher: Elsevier BV

Published year: 2019

Published pages: 111126

DOI identifier: 10.1016/j.mee.2019.111126

ISSN: 0167-9317