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Authors: Zhaofu Zhang, Jiaqi Chen, Yuzheng Guo, John Robertson
Journal title: Microelectronic Engineering
Journal number: 216
Journal publisher: Elsevier BV
Published year: 2019
Published pages: 111057
DOI identifier: 10.1016/j.mee.2019.111057
ISSN: 0167-9317
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