Plasma-Enhanced Atomic Layer Deposition of Al2O3 on Graphene Using Monolayer hBN as Interfacial Layer

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Authors: Bárbara Canto,Martin Otto,Michael J. Powell,Vitaliy Babenko,Aileen O'Mahony,Harm C. M. Knoops,Ravi S. Sundaram,Stephan Hofmann,Max C. Lemme,Daniel Neumaier

Journal title: Advanced Materials Technology

Journal number: 6 / 11

Journal publisher: Wiley

Published year: 2021

Published pages: 2100489

DOI identifier: 10.1002/admt.202100489

ISSN: 2365-709X