Fabrication of sub-micrometer periodic nanostructures using pulsed laser interference for efficient light trapping in optoelectronic devices

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Authors: Saraswati Behera, Yunran Wang, Im Sik Han, Chaoyuan Jin, Mark Hopkinson

Journal title: Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXV

Journal publisher: SPIE

Published year: 2020

Published pages: 46

DOI identifier: 10.1117/12.2546212

ISBN: 9781510632981