Gaining Micropattern Fidelity in an NOA81 Microsieve Laser Ablation Process

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Authors: Rahman Sabahi-Kaviani, Regina Luttge

Journal title: Micromachines

Journal number: 12/1

Journal publisher: Multidisciplinary Digital Publishing Institute (MDPI)

Published year: 2021

Published pages: 21

DOI identifier: 10.3390/mi12010021

ISSN: 2072-666X