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Authors: Alex Bastiaens, Jean-Philippe Frimat, Teun van Nunen, Regina Luttge
Journal title: Journal of Vacuum Science & Technology B
Journal number: 37/6
Journal publisher: AVS Science and Technology Society
Published year: 2019
Published pages: 061802
DOI identifier: 10.1116/1.5119687
ISSN: 2166-2754