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Authors: David J. Kinahan, Sarai M. Delgado, Lourdes A.N. Julius, Adam Mallette, David Saenz-Ardila, Rohit Mishra, Celina M. Miyazaki, Jan Korvink, Dario Mager, Jens Ducree
Journal title: 2018 IEEE Micro Electro Mechanical Systems (MEMS)
Journal number: 17733066
Journal publisher: IEEE
Published year: 2018
Published pages: 1213-1216
DOI identifier: 10.1109/memsys.2018.8346781
ISBN: 978-1-5386-4782-0