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Authors: Omar Nassar, Mazin Jouda, Michael Rapp, Dario Mager, Jan G. Korvink, Neil MacKinnon
Journal title: Microsystems & Nanoengineering
Journal number: 7/1
Journal publisher: Nature Portfolio
Published year: 2021
Published pages: pp.1-17
DOI identifier: 10.1038/s41378-021-00253-2
ISSN: 2055-7434