Low-resistivity, high-resolution W-C electrical contacts fabricated by direct-write focused electron beam induced deposition

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Authors: Orús, Pablo; Sigloch, Fabian; Sangiao, Soraya; De Teresa, José María

Journal title: Open Research Europe

Journal number: 4

Journal publisher: F1000 Research Limited on behalf of the European Commission

Published year: 2022

DOI identifier: 10.12688/openreseurope.15000.1

ISSN: 2732-5121