Electron-beam lithography of nanostructures at the tips of scanning probe cantilevers

Summary

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Authors: Luca Forrer, Aurèle Kamber, Armin Knoll, Martino Poggio, Floris Braakman

Journal title: AIP Advances

Journal publisher: American Institute of Physics Inc.

Published year: 2023

DOI identifier: 10.1063/5.0127665

ISSN: 2158-3226