Electron beam lithography for direct patterning of MoS2 on PDMS substrates.

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Authors: Gil Jumbert; Marcel Placidi; Francesc Alzina; Clivia M. Sotomayor Torres; Marianna Sledzinska

Journal title: RSC Adv.

Journal publisher: Royal Society of Chemistry

Published year: 2021

DOI identifier: 10.1039/d1ra00885d

ISSN: 2046-2069