A thick silicon photonics platform for quantum technologies

Summary

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Authors: Matteo Cherchi, Arijit Bera, Antti Kemppinen, Jaani Nissilä, Kirsi Tappura, Marco Caputo, Lauri Lehtimäki, Janne Lehtinen, Joonas Govenius, Mika Prunnila, Timo Aalto

Journal publisher: ECIO

Published year: 2022

Published pages: W.P.18