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Authors: Jörn Bonse, Sabrina V. Kirner, Sandra Höhm, Nadja Epperlein, Dirk Spaltmann, Arkadi Rosenfeld, Jörg Krüger
Journal title: Laser-based Micro- and Nanoprocessing XI
Journal number: 10092
Journal publisher: SPIE
Published year: 2017
Published pages: 100920N
DOI identifier: 10.1117/12.2250919
ISBN: 9781-510606258