Coherent scatter-controlled phase-change grating structures in silicon using femtosecond laser pulses

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Authors: Yasser Fuentes-Edfuf, Mario Garcia-Lechuga, Daniel Puerto, Camilo Florian, Adianez Garcia-Leis, Santiago Sanchez-Cortes, Javier Solis, Jan Siegel

Journal title: Scientific Reports

Journal number: 7/1

Journal publisher: Nature Publishing Group

Published year: 2017

DOI identifier: 10.1038/s41598-017-04891-3

ISSN: 2045-2322