Fabrication of amorphous micro-ring arrays in crystalline silicon using ultrashort laser pulses

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Authors: Yasser Fuentes-Edfuf, Mario Garcia-Lechuga, Daniel Puerto, Camilo Florian, Adianez Garcia-Leis, Santiago Sanchez-Cortes, Javier Solis, Jan Siegel

Journal title: Applied Physics Letters

Journal number: 110/21

Journal publisher: American Institute of Physics

Published year: 2017

Published pages: 211602

DOI identifier: 10.1063/1.4984110

ISSN: 0003-6951