Optimization in the Design and Fabrication of a PZT Piezoelectric Micromachined Ultrasound Transducer (PMUT)

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Authors: Sina Sadeghpour, Robert Puers

Journal title: Proceedings

Journal number: 2/13

Journal publisher: MDPI

Published year: 2018

Published pages: 743

DOI identifier: 10.3390/proceedings2130743

ISSN: 2504-3900