Flexible Soi-Based Piezoelectric Micromachined Ultrasound Transducer (PMUT) Arrays

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Authors: Sina Sadeghpour, Bram Lips, Michael Kraft, Robert Puers

Journal title: 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)

Journal publisher: IEEE

Published year: 2019

Published pages: 250-253

DOI identifier: 10.1109/transducers.2019.8808793

ISBN: 978-1-5386-8104-6