Summary
Assembly of a scanning sample stage of SPM from a X, Y, Z scanning piezo unit (X, Y: 100 × 100 μm2) and closed loop x-y-z piezo sample manipulator for a precise navigation to a specific sample site. Equipping the head carrying the cantilever with a cantilever-deflection detection system and a piezo providing cantilever oscillations (non-contact mode). Working prototype.
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