Influence of Conditioning Temperature on Defects in the Double Al2O3/ZnO Layer Deposited by the ALD Method.

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Authors: K. Gawlińska-Nęcek; Mateusz Wlazło; Robert P. Socha; Ireneusz Stefaniuk; Łukasz Major; Piotr Panek

Journal title: Materials

Journal number: 14 (4) 2158

Journal publisher: MDPI Open Access Publishing

Published year: 2021

DOI identifier: 10.3390/ma14041038

ISSN: 1996-1944