Efficient resonance management in ultrahigh-Q one-dimensional photonic crystal nanocavities fabricated on 300 mm SOI CMOS platform

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Authors: Xie, Weiqiang; Verheyen, Peter; Pantouvaki, Marianna; Van Campenhout, Joris; Van Thourhout, Dries

Journal title: Laser & Photonics Review

Journal number: 20

Journal publisher: ACS

Published year: 2020

DOI identifier: 10.1002/lpor.202000317

ISSN: 1863-8899