Controlling the flux of reactive species: a case study on thin film deposition in an aniline/argon plasma

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Authors: D. Sciacqua, C. Pattyn, A. Jagodar, E. von Wahl, T. Lecas, T. Strunskus, E. Kovacevic and J. Berndt

Journal title: Scientific Reports

Journal number: 10/1

Journal publisher: Nature Publishing Group

Published year: 2020

DOI identifier: 10.1038/s41598-020-72634-y

ISSN: 2045-2322