Double-discharge plasma system for deposition of carbon nanostructures

Summary

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Authors: S Marinov, V Vachkov, I Ivanov and Zh Kissovski

Journal title: Journal of Physics: Conference Series

Journal number: 2240

Journal publisher: IOP Publisher

Published year: 2022

DOI identifier: 10.1088/1742-6596/2240/1/012020

ISSN: 1742-6596