Towards universal plasma-enabled platform for the advanced nanofabrication: plasma physics level approach

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Authors: O. Baranov, S. Xu, K. Ostrikov, B. B. Wang, U. Cvelbar, K. Bazaka, I. Levchenko

Journal title: Reviews of Modern Plasma Physics

Journal number: 2/1

Journal publisher: Springer

Published year: 2018

DOI identifier: 10.1007/s41614-018-0016-7

ISSN: 2367-3192