Oxygen plasmas: a sharp chisel and handy trowel for nanofabrication

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Authors: K. Bazaka, O. Baranov, U. Cvelbar, B. Podgornik, Y. Wang, S. Huang, L. Xu, J. W. M. Lim, I. Levchenko, S. Xu

Journal title: Nanoscale

Journal number: 10/37

Journal publisher: Royal Society of Chemistry

Published year: 2018

Published pages: 17494-17511

DOI identifier: 10.1039/c8nr06502k

ISSN: 2040-3364