Formation and behavior of negative ions in low pressure aniline-containing RF plasmas

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Authors: Cedric Pattyn, Eva Kovacevic, Thomas Strunskus, Thomas Lecas, Johannes Berndt

Journal title: Scientific Reports

Journal number: 9/1

Journal publisher: Nature Publishing Group

Published year: 2019

DOI identifier: 10.1038/s41598-019-47425-9

ISSN: 2045-2322