Deposition of vertical carbon nanosheets by MPECVD at atmospheric pressure

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Authors: S. Marinov, V. Vachkov, Zh. Kissovski

Journal title: Journal of Physics: Conference Series

Journal number: 1492

Journal publisher: IOP Publishing

Published year: 2020

DOI identifier: 10.1088/1742-6596/1492/1/012032

ISSN: 1742-6596