BiCMOS Embedded Microfluidic Technology Based on Wafer Bonding Techniques for Biosensor Applications

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Authors: M. Inac, M. Wietstruck, A. Göritz, B. Cetindogan, C. Baristiran Kaynak, S. Marschmeyer, M. Fraschke, T. Voss, A. Mai, C. Palego, A. Pothier, M. Kaynak

Journal title: 2017 MikroSystemTechnik Kongress (MST 2017)

Journal publisher: VDE Verband der Elektrotechnik Elektronik Informationstechnik

Published year: 2017

Published pages: 273-276

ISBN: 978-3-8007-4491-6