Sensitive capacitive pressure sensors based on graphene membrane arrays

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Authors: Makars Šiškins, Martin Lee, Dominique Wehenkel, Richard van Rijn, Tijmen W. de Jong, Johannes R. Renshof, Berend C. Hopman, Willemijn S. J. M. Peters, Dejan Davidovikj, Herre S. J. van der Zant, Peter G. Steeneken

Journal title: Microsystems & Nanoengineering

Journal number: 6/1

Journal publisher: Springer Nature

Published year: 2020

DOI identifier: 10.1038/s41378-020-00212-3

ISSN: 2055-7434