Ultralow-dielectric-constant amorphous boron nitride

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Authors: Seokmo Hong, Chang-Seok Lee, Min-Hyun Lee, Yeongdong Lee, Kyung Yeol Ma, Gwangwoo Kim, Seong In Yoon, Kyuwook Ihm, Ki-Jeong Kim, Tae Joo Shin, Sang Won Kim, Eun-chae Jeon, Hansol Jeon, Ju-Young Kim, Hyung-Ik Lee, Zonghoon Lee, Aleandro Antidormi, Stephan Roche, Manish Chhowalla, Hyeon-Jin Shin, Hyeon Suk Shin

Journal title: Nature

Journal number: 582/7813

Journal publisher: Nature Publishing Group

Published year: 2020

Published pages: 511-514

DOI identifier: 10.1038/s41586-020-2375-9

ISSN: 0028-0836