Large-area integration of two-dimensional materials and their heterostructures by wafer bonding

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Authors: Arne Quellmalz, Xiaojing Wang, Simon Sawallich, Burkay Uzlu, Martin Otto, Stefan Wagner, Zhenxing Wang, Maximilian Prechtl, Oliver Hartwig, Siwei Luo, Georg S. Duesberg, Max C. Lemme, Kristinn B. Gylfason, Niclas Roxhed, Göran Stemme, Frank Niklaus

Journal title: Nature Communications

Journal number: 12/1

Journal publisher: Nature Publishing Group

Published year: 2021

DOI identifier: 10.1038/s41467-021-21136-0

ISSN: 2041-1723