Superior electrostatic control in uniform monolayer MoS2 scaled transistors via in-situ surface smoothening

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Authors: Yuanyuan Shi; Benjamin Groven; Quentin Smets; Surajit Sutar; Sreetama Banerjee; Henry Medina; Xiangyu Wu; Cedric Huyghebaert; Steven Brems; Dennis Lin; Pierre Morin; Matty Caymax; Inge Asselberghs; Iuliana Radu

Journal title: 2021 IEEE International Electron Devices Meeting

Journal publisher: IEEE

Published year: 2021

DOI identifier: 10.1109/iedm19574.2021.9720676