Graphene as an active virtually massless top electrode for RF solidly mounted bulk acoustic wave (SMR-BAW) resonators

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Authors: Marius Knapp, René Hoffmann, Vadim Lebedev, Volker Cimalla, Oliver Ambacher

Journal title: Nanotechnology

Journal number: 29/10

Journal publisher: Institute of Physics Publishing

Published year: 2018

Published pages: 105302

DOI identifier: 10.1088/1361-6528/aaa6bc

ISSN: 0957-4484