Nanopore fabrication and characterization by helium ion microscopy

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Authors: D. Emmrich, A. Beyer, A. Nadzeyka, S. Bauerdick, J. C. Meyer, J. Kotakoski, A. Gölzhäuser

Journal title: Applied Physics Letters

Journal number: 108/16

Journal publisher: American Institute of Physics

Published year: 2016

Published pages: 163103

DOI identifier: 10.1063/1.4947277

ISSN: 0003-6951