Characterization of a cold cathode Penning ion source for the implantation of noble gases beneath 2D monolayers on metals: Ions and neutrals

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Authors: Huanyao Cun, Annina Spescha, Adrian Schuler, Matthias Hengsberger, Jürg Osterwalder, Thomas Greber

Journal title: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Journal number: 34/2

Journal publisher: American Institute of Physics

Published year: 2016

Published pages: 020602

DOI identifier: 10.1116/1.4939507

ISSN: 0734-2101