Single G centers in silicon fabricated by co-implantation with carbon and proton

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Authors: Yoann Baron, 1, a) Alrik Durand, 1, a) Tobias Herzig 2 , 2 Mario Khoury, 3 Sébastien Pezzagna, 2 Jan Meijer, 2 Isabelle Robert-Philip, 1 Marco Abbarchi, 3 Jean-Michel Hartmann, 4 Shay Reboh, 4 Jean-Michel Gérard, 5 Vincent Jacques, 1 Guillaume Cassabois, 1 and Anaı̈s Dréau

Journal title: APL

Journal number: 10773118

Journal publisher: AIP

Published year: 2022

DOI identifier: 10.1063/5.0097407

ISSN: 1077-3118