Nanoimprint Lithography Processing of Inorganic-Based Materials

Summary

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Authors: Mehrnaz Modaresialam, Zeinab Chehadi, Thomas Bottein, Marco Abbarchi, and David Grosso

Journal title: Chemistry of Materials

Journal number: 08974756

Journal publisher: American Chemical Society

Published year: 2021

DOI identifier: 10.1021/acs.chemmater.1c00693

ISSN: 0897-4756