Local defect-free elastic strain relaxation of Si1-xGex embedded into SiO2

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Authors: Elie Assaf Isabelle Berbezier Mohammed Bouabdellaoui Marco Abbarchi Antoine Ronda Damien Valenducq Fabien Deprat Olivier Gourhant Andreas Campos Luc Favre

Journal title: Applied Surface Science

Journal number: 01694332

Journal publisher: Elsevier BV

Published year: 2022

Published pages: 153015

DOI identifier: 10.1016/j.apsusc.2022.153015

ISSN: 0169-4332