Engineering of the spin on dopant process on silicon on insulator substrate

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Authors: Chiara Barri, Erfan Mafakheri, Luca Fagiani, Giulio Tavani, Andrea Barzaghi, Daniel Chrastina, Alexey Fedorov, Jacopo Frigerio, Mario Lodari, Francesco Scotognella, Elisa Arduca, Marco Abbarchi, Michele Perego and Monica Bollani

Journal title: Nanotechnology

Journal number: 32

Journal publisher: Institute of Physics Publishing

Published year: 2020

Published pages: 025303

DOI identifier: 10.1088/1361-6528/abbdda

ISSN: 0957-4484