Investigation of temperature sensitivity of a MEMS gravimeter based on geometric anti-spring

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Authors: Vinod Belwanshi, Abhinav Prasad, Karl Toland, Richard Middlemiss, Douglas Paul, and Giles Hammond

Journal title: Review of Scientific Instruments

Journal number: 93, 125002

Journal publisher: American Institute of Physics

Published year: 2022

DOI identifier: 10.1063/5.0114664

ISSN: 0034-6748