Integration of sharp silicon nitride tips into high-speed SU8 cantilevers in a batch fabrication process

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Authors: Nahid Hosseini, Matthias Neuenschwander, Oliver Peric, Santiago H Andany, Jonathan D Adams, Georg E Fantner

Journal title: Beilstein Journal of Nanotechnology

Journal number: 10

Journal publisher: Beilstein-Institut Zur Forderung der Chemischen Wissenschaften

Published year: 2019

Published pages: 2357-2363

DOI identifier: 10.3762/bjnano.10.226

ISSN: 2190-4286