Data-Driven Feedforward Hysteresis Compensation with Genetic Algorithm for Atomic Force Microscope

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Authors: Asmari, Navid ; Kangul, Mustafa ; Andany, Santiago H. ; Karimi, Alireza ; Fantner, Georg E.

Journal publisher: IEEE

Published year: 2022

DOI identifier: 10.1109/marss55884.2022.9870479

ISBN: 978-1-6654-5974-7