A hybrid polymer/ceramic/semiconductor fabrication platform for high-sensitivity fluid-compatible MEMS devices with sealed integrated electronics

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Authors: Nahid Hosseini, Matthias Neuenschwander, Jonathan D. Adams, Santiago H. Andany, Oliver Peric, Marcel Winhold, Maria Carmen Giordano, Vinayak Shantaram Bhat, Dirk Grundler, Georg E. Fantner

Journal publisher: arXiv

Published year: 2023

DOI identifier: 10.48550/arxiv.2307.05221