Batch Fabrication of Multilayer Polymer Cantilevers with Integrated Hard Tips for High-Speed Atomic Force Microscopy

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Authors: Nahid Hosseini, Oliver Peric, Matthias Neuenschwander, Santiago H. Andany, Jonathan D. Adams, Georg E. Fantner

Journal title: 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)

Journal publisher: IEEE

Published year: 2019

Published pages: 2033-2036

DOI identifier: 10.1109/transducers.2019.8808606

ISBN: 978-1-5386-8104-6